- radio-frequency plasma etching
- високочастотне плазмове травлення
English-Ukrainian dictionary of microelectronics. 2013.
radio-frequency plasma etching
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Plasma (physics) — For other uses, see Plasma. Plasma lamp, illustrating some of the more complex phenomena of a plasma, including filamentation. The colors are a result of relaxation of electrons in excited states to lower energy states after they have recombined… … Wikipedia
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